Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect

Wu, Yunqiao; Zhou, Jun; Pun, Edwin Y. B.

doi:doi:10.1117/1.3665215

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Journal of Micro/Nanolithography, MEMS, and MOEMS / Volume 10 / Issue 4 / Communications

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Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect

J. Micro/Nanolith. MEMS MOEMS 10, 049701 (Dec 14, 2011); http://dx.doi.org/10.1117/1.3665215

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Abstract

References (13)

Yunqiao Wu

Ningbo University, Faculty of Science, Institute of Photonics, Ningbo 315211, Zhejiang, China and Taiyuan University of Technology, Department of Physics and Optoelectronics, Institute of Optoelectronic Engineering, Taiyuan 030024, China and City University of Hong Kong, Department of Electronic Engineering, Tat Chee Avenue, Kowloon, Hong Kong

Jun Zhou

Ningbo University, Faculty of Science, Institute of Photonics, Ningbo 315211, Zhejiang, China

Edwin Y. B. Pun

City University of Hong Kong, Department of Electronic Engineering, Tat Chee Avenue, Kowloon, Hong Kong

High quality rectangular micro- to nanochannels with SiO₂ shells have been fabricated by using optimized preparation parameters. Various dimensions of cross section of channels have been effectively controlled via the polymethyl methacrylate template as a suitable sacrificial layer in the processes of pattern formation and nanolithography. And, the fabricated channels have excellent shape uniformity, smooth inner surface, and vertical sidewalls along the longitudinal axis, which is confirmed by the good agreement between the experimental data and theoretical values of the mean filling speeds of liquids in the confined space. This technique exhibits the potential advantage for the controllable fabrication of various micro- to nanofluidic devices.

History

Received Jun 30, 2011
Accepted Nov 11, 2011
Revised Sep 27, 2011
Published online Dec 14, 2011

Digital Object Identifier

http://dx.doi.org/10.1117/1.3665215

Citation

Yunqiao Wu, Jun Zhou and Edwin Y. B. Pun, "Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect", J. Micro/Nanolith. MEMS MOEMS 10, 049701 (Dec 14, 2011); http://dx.doi.org/10.1117/1.3665215