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Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth

J. Nanophoton. 5, 059507 (Dec 13, 2011); http://dx.doi.org/10.1117/1.3666059

Jason J. Ackert, Dylan F. Logan, and Andrew P. Knights

McMaster University, Department of Engineering Physics, 1280 Main St. West, John Hodgins Engineering Building, Room A315, Hamilton, ON L8S 4L8 Canada ackertjj@mcmaster.ca

Marco Fiorentino and Raymond G. Beausoleil

Hewlett Packard Laboratories, 1501 Page Mill Road, Palo Alto, California

Paul E. Jessop

Wilfrid Laurier University, Department of Physics, 75 University Avenue West, Waterloo, Canada

We have devised and fabricated high-speed silicon-on-insulator resonant microring photodiodes. The detectors comprise a p-i-n junction across a silicon rib waveguide microring resonator. Light absorption at 1550 nm is enhanced by implanting the diode intrinsic region with boron ions at 350 keV with a dosage of 1 × 1013 cm−2. We have measured 3-dB bandwidths of 2.4 and 3.5 GHz at 5 and 15 V reverse bias, respectively, and observed an open-eye diagram at 5 gigabit/s with 5 V bias.

© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)

History
Received Sep 29, 2011
Accepted Nov 16, 2011
Revised Nov 14, 2011
Published online Dec 13, 2011
Citation
Jason J. Ackert, Marco Fiorentino, Dylan F. Logan, Raymond G. Beausoleil, Paul E. Jessop and Andrew P. Knights, "Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth", J. Nanophoton. 5, 059507 (Dec 13, 2011); http://dx.doi.org/10.1117/1.3666059

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