GENERAL INFORMATION
Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth
J. Nanophoton. 5, 059507 (Dec 13, 2011); http://dx.doi.org/10.1117/1.3666059
We have devised and fabricated high-speed silicon-on-insulator resonant microring photodiodes. The detectors comprise a p-i-n junction across a silicon rib waveguide microring resonator. Light absorption at 1550 nm is enhanced by implanting the diode intrinsic region with boron ions at 350 keV with a dosage of 1 × 1013 cm−2. We have measured 3-dB bandwidths of 2.4 and 3.5 GHz at 5 and 15 V reverse bias, respectively, and observed an open-eye diagram at 5 gigabit/s with 5 V bias.
© 2011 Society of Photo-Optical Instrumentation Engineers (SPIE)
History
Received Sep 29, 2011
Accepted Nov 16, 2011
Revised Nov 14, 2011
Published online Dec 13, 2011
Accepted Nov 16, 2011
Revised Nov 14, 2011
Published online Dec 13, 2011
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Citation
Jason J. Ackert, Marco Fiorentino, Dylan F. Logan, Raymond G. Beausoleil, Paul E. Jessop and Andrew P. Knights, "Silicon-on-insulator microring resonator defect-based photodetector with 3.5-GHz bandwidth",
J. Nanophoton. 5, 059507 (Dec 13, 2011); http://dx.doi.org/10.1117/1.3666059
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