Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles

Harvey, James E.; Schröder, Sven; Choi, Narak; Duparré, Angela

doi:doi:10.1117/1.OE.51.1.013402

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Optical Engineering / Volume 51 / Issue 1 / Optical Fabrication

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Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles

Opt. Eng. 51, 013402 (Feb 06, 2012); http://dx.doi.org/10.1117/1.OE.51.1.013402

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Abstract

References (50)

James E. Harvey and Narak Choi

The University of Central Florida, The Center for Research and Education in Optics and Lasers (CREOL), P.O. Box 162700, 4000 Central Florida Blvd., Orlando, Florida 32826

Sven Schröder and Angela Duparré

Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Straße 7, 07745 Jena, Germany

Surface scatter effects from residual optical fabrication errors can severely degrade optical performance. The total integrated scatter (TIS) from a given mirror surface is determined by the ratio of the spatial frequency band-limited “relevant” root-mean-square surface roughness to the wavelength of light. For short-wavelength (extreme-ultraviolet/x-ray) applications, even state-of-the-art optical surfaces can scatter a significant fraction of the total reflected light. In this paper we first discuss how to calculate the band-limited relevant roughness from surface metrology data, then present parametric plots of the TIS for optical surfaces with arbitrary roughness, surface correlation widths, and incident angles. Surfaces with both Gaussian and ABC or K-correlation power spectral density functions have been modeled. These parametric TIS predictions provide insight that is useful in determining realistic optical fabrication tolerances necessary to satisfy specific optical performance requirements.

History

Received Aug 03, 2011
Accepted Nov 17, 2011
Revised Oct 18, 2011
Published online Feb 06, 2012

Digital Object Identifier

http://dx.doi.org/10.1117/1.OE.51.1.013402

Citation

James E. Harvey, Sven Schröder, Narak Choi and Angela Duparré, "Total integrated scatter from surfaces with arbitrary roughness, correlation widths, and incident angles", Opt. Eng. 51, 013402 (Feb 06, 2012); http://dx.doi.org/10.1117/1.OE.51.1.013402