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Limitations of the confocal imaging algorithm in surface profiling
Proc. SPIE 3749, 490 (1999); http://dx.doi.org/10.1117/12.354848
Monday 02 August 1999
San Francisco, CA, USA
18th Congress of the International Commission for Optics
Alexander J. Glass, Joseph W. Goodman, Milton Chang, Arthur H. Guenther, Toshimitsu Asakura
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Add to FacebookBased on the capability of confocal microscopy to profile rough surfaces, Quartel and Sheppard have proposed an algorithm to reconstruct surface profiles from scattering data. We determine the range of applicability of the algorithm by investigating the effects of the roughness and correlation length of a random surface on the reconstruction.
© 2003 COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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Online Aug 05, 2003
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J. F. Aguilar and Colin J. R. Sheppard, "Limitations of the confocal imaging algorithm in surface profiling",
Proc. SPIE 3749, 490 (1999); http://dx.doi.org/10.1117/12.354848
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