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Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture
Proc. SPIE 5145, 189 (2003); http://dx.doi.org/10.1117/12.501463
Monday 23 June 2003
Munich, Germany
Microsystems Engineering: Metrology and Inspection III
Christophe Gorecki
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Add to FacebookWhile testing electrical properties in microsystems is a well-developed art, the testing of mechanical properties of MEMS devices is not. There is a great need for techniques that will permit the evaluation of MEMS devices, in all stages of manufacturing, with respect to material and micromechanical properties. In this contribution we propose a new approach, based on the integrated optical read-out using a Mach-Zehnder interferometer, monolithically integrated into the PZT actuated membrane.
© 2003 COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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Online Nov 10, 2003
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Christophe Gorecki, Andrei Sabac, P. Bey, K. Gut, Alain Jacobelli and Thierry Dean, "Integrated optomechanical sensor for in situ characterization of MEMS: the implementing of a readout architecture",
Proc. SPIE 5145, 189 (2003); http://dx.doi.org/10.1117/12.501463
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