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Evolutionary approach to an inverse problem in near-field optics microscopy
Proc. SPIE 5458, 188 (2004); doi:10.1117/12.545793
Thursday 29 April 2004
Strasbourg, France
Optical Micro- and Nanometrology in Manufacturing Technology
Christophe Gorecki, Anand K. Asundi
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Add to FacebookIn the present work we employ an heuristic method based on evolutionary algorithms for the solution of an inverse problem in near-field optics. The input for the inversion procedure are some of the experimental data that appear in reference 1. In addition, we make use of the direct model proposed in that reference for the iterative solution of the direct problem. This requirement is directly related to the nature of the evolutionary approach employed. We show the possibility to recover, with a high degree of confidence, some parameters of the sample that originated the experimental information. The usefulness of the inverse method is therefore obvious if the recorded data have to be used for metrologic purpose.
© 2004 COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
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Online Sep 02, 2004
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Demetrio Macias, Dominique Barchiesi and Alexandre Vial, "Evolutionary approach to an inverse problem in near-field optics microscopy",
Proc. SPIE 5458, 188 (2004); doi:10.1117/12.545793
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