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Akira Higuchi
at HOLON
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Publications (1)
Proceedings Article | 2 April 2014 Paper
Accurate contour extraction from mask SEM image
Izumi Santo, Akira Higuchi, Mirai Anazawa, Hideaki Bandoh
Proceedings Volume 9050, 90502M (2014) https://doi.org/10.1117/12.2046530
KEYWORDS: Photomasks, Scanning electron microscopy, Distortion, Lithography, Optical proximity correction, Ions, Image processing, Holons, Feature extraction, Edge roughness
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