Dr. Alexander A. Popov
at Valiev IPT RAS, Yaroslavl Branch
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 121570E (2022) https://doi.org/10.1117/12.2624084
KEYWORDS: Metals, Silicon, Oxides, Nickel, Dielectrics, Switching, Sputter deposition, Platinum, Copper, Chemical species

Proceedings Article | 15 March 2019 Paper
A. Popov, A. Berdnikov
Proceedings Volume 11022, 1102218 (2019) https://doi.org/10.1117/12.2521784
KEYWORDS: Particles, Silicon, Silicon films, Dielectrics, Amorphous silicon, Switching, Plasma, Plasma enhanced chemical vapor deposition, Oxides, Polymerization

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