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Alexandre Marchese
PhD Student at CNRS
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Publications (1)
Proceedings Article | 22 January 2005 Paper
Large silicon micromirror modeling and fabrication
Alexandre Marchese, Henri Camon, Christian Ganibal
Proceedings Volume 5717, (2005) https://doi.org/10.1117/12.590270
KEYWORDS: Mirrors, Silicon, Electrodes, Micromirrors, Switching, Ceramics, Microelectromechanical systems, Microopto electromechanical systems, Digital micromirror devices
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