Mr. Anatoly I. Malyshev Profile

Anatoly I. Malyshev

at Institute of Automation and Electrometry of the SB RAS

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Author

Publications (5)

Proceedings Article | 19 December 2022 Poster + Presentation + Paper

Analyzing the tolerances on direct laser writing of two-dimensional Dammann gratings and performing the software correction of writing modes

Victor Korolkov, Andrey Sedukhin, Roman Kuts, Vadim Cherkashin, Sergey Golubtsov, Anatoly Malyshev, Dmitrij Belousov

Proceedings Volume 12318, 123182G (2022) https://doi.org/10.1117/12.2643720

KEYWORDS: Photoresist materials, Diffraction, Tolerancing, Diffraction gratings, Multiphoton lithography, Photomasks, Statistical analysis, Process control, Glasses, Distortion

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Proceedings Article | 12 September 2021 Presentation + Paper

Usage of dry processes for the formation of diffractive structures on Ti and Ti/Si films

Viktor Korolkov, Roman Kuts, Anatoly Malyshev, Dmitry Belousov, Aleksey Matochkin

Proceedings Volume 11873, 1187307 (2021) https://doi.org/10.1117/12.2597162

KEYWORDS: Titanium, Silicon, Reactive ion etching, Oxidation, Etching, Silicon films, Oxides, Annealing, Reflection, Silica

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Proceedings Article | 12 September 2021 Presentation + Paper

Development of method for measuring a light energy distribution over foci for mould of diffractive component of bifocal intraocular lens

V. Korolkov, P. Konoshenko, S. Mikerin, D. Belousov, A. Malyshev, S. Golubtsov

Proceedings Volume 11873, 118730G (2021) https://doi.org/10.1117/12.2597112

KEYWORDS: Refractive index, Photoresist materials, Diffraction, Silica, Liquids, Diffractive optical elements, Manufacturing, Intraocular lenses, Eye, Polymers

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Proceedings Article | 10 October 2020 Poster + Presentation + Paper

Dry method for the formation of reflective phase DOEs using direct laser writing on thin Zr films

Victor Korolkov, Roman Kuts, Anatolij Malyshev, Alexey Matochkin, Ruslan Shimansky

Proceedings Volume 11551, 115511O (2020) https://doi.org/10.1117/12.2574196

KEYWORDS: Zirconium, Multiphoton lithography, Reflectivity, Thin films, Oxidation, Metals, Diffractive optical elements, Liquids, Plasma treatment, Silica

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Proceedings Article | 18 November 2019 Paper

Direct laser writing of high-NA computer-generated holograms on metal films of the titanium group and chromium

Victor Korolkov, Ruslan Nasyrov, Alaxander Sametov, Anatoly Malyshev, Dmitry Belousov, Sergey Mikerin, R. Kuts

Proceedings Volume 11188, 111880R (2019) https://doi.org/10.1117/12.2537269

KEYWORDS: Computer generated holography, Metals, Titanium, Multiphoton lithography, Laser applications, Radiation effects, Spatial resolution, Interferometry, Mirrors, Manufacturing

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