Mr. Anton Shishlyannikov Profile

Anton Shishlyannikov

at Molecular Electronics Research Institute

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 31 January 2022 Paper

A. Miakonkikh, A. Shishlyannikov, A. Tatarintsev, V. Kuzmenko, K. Rudenko, E. Gornev

Proceedings Volume 12157, 1215717 (2022) https://doi.org/10.1117/12.2626386

KEYWORDS: Etching, Silicon, Plasma, Plasma etching

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases