Bertrand Darbon
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Publications (3)

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11615, 116150K (2021) https://doi.org/10.1117/12.2583810
KEYWORDS: Machine learning, Semiconductors, Microscopes, Metrology, Process engineering, Manufacturing, Image processing, Databases, Algorithm development, Transmission electron microscopy

Proceedings Article | 22 February 2021 Poster + Presentation + Paper
Proceedings Volume 11611, 116112V (2021) https://doi.org/10.1117/12.2583746
KEYWORDS: Metrology, Machine learning, Machine vision, Critical dimension metrology, Scanning electron microscopy, 3D metrology, Semiconducting wafers, Image processing, High volume manufacturing, 3D image processing

Proceedings Article | 23 March 2020 Paper
Proceedings Volume 11329, 113290X (2020) https://doi.org/10.1117/12.2552033
KEYWORDS: 3D metrology, Machine learning, Scanning electron microscopy, 3D image processing, Process engineering, Transmission electron microscopy, Image processing, 3D modeling, Semiconductors, Computer simulations

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