Mr. Chao-min Huang Profile

Chao-min Huang

at National Taiwan Univ

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Publications (1)

Proceedings Article | 31 January 2013 Paper

A contact probe using Michelson interferometers for CMMs

Chao-min Huang, Bo-Hsun Liao, Kuang-Chao Fan

Proceedings Volume 8759, 87592E (2013) https://doi.org/10.1117/12.2016788

KEYWORDS: Sensors, Michelson interferometers, Calibration, Mirrors, Microelectromechanical systems, Detector development, Motion detection, 3D modeling, Silicon, 3D metrology

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