Proceedings Article | 15 February 2022
C. Pan, S. Sha, T. Tang, H. Li
KEYWORDS: Polishing, Surface finishing, Mirrors, Head, Control systems, Astatine, Aspheric optics, Spherical lenses, Roads, Raster graphics
At present, aspheric mirrors are being used more and more widely in various optical systems, and the quality and precision requirements of the components are gradually increasing. Aspheric mirror processing process is divided into milling and grinding molding, aspheric grinding, finishing treatment, coating, etc. Polishing is an important process to improve the precision of the components, and various polishing methods are rapidly developing, mainly ion beam processing, magnetorheological processing, magneto-jet polishing and airbag polishing. Among them, airbag polishing belongs to the flexible polishing, his advantages are uniform and controllable pressure, adjustable polishing speed, can adapt to more complex surface characteristics and high polishing accuracy, in the finishing application prospects. But the airbag polishing path planning has been a problem of choice, common path planning methods and raster path, concentric path, spiral line path, sine spiral line path, random path and so on. The first three paths are too regular because of the trajectory, so they will introduce high and medium frequency errors in processing. The sinusoidal spiral path eliminates some of the medium and high frequency errors by introducing the sinusoidal oscillation of the airbag on the basis of the spiral path. The random path, on the other hand, avoids the generation of the mid-high frequency error by avoiding the appearance of a regular route.
