Dr. Chi Feng Tseng Profile

Dr. Chi Feng Tseng

at Macronix International Co Ltd

SPIE Involvement:

Author

Publications (3)

Proceedings Article | 26 May 2022 Poster + Paper

Machine learning modeling using process context and exposure data for overlay prediction

W. H. Wang, Irina Brinster, Mohsen Maniat, Fatima Anis, Yen-Hui Lee, Sven Boese, C. F. Tseng, Wei-Yuan Chu, Boris Habets, C. H. Huang, Elvis Yang, T. H. Yang, K. C. Chen

Proceedings Volume 12053, 120531Q (2022) https://doi.org/10.1117/12.2613202

KEYWORDS: Semiconducting wafers, Overlay metrology, Data modeling, Metrology, Optical parametric oscillators, Performance modeling, Process modeling, Machine learning, Semiconductor manufacturing, Data processing

Read Abstract +

Proceedings Article | 18 March 2015 Paper

Reducing the substrate dependent scanner leveling effect in low-k1 contact printing

C. S. Chang, C. F. Tseng, C. H. Huang, Elvis Yang, T. H. Yang, K. C. Chen

Proceedings Volume 9426, 94261F (2015) https://doi.org/10.1117/12.2083811

KEYWORDS: Semiconducting wafers, Near infrared, Scanners, Printing, Sensors, Chemical mechanical planarization, Etching, Dielectrics, Opacity, Silicon

Read Abstract +

Proceedings Article | 7 March 2008 Paper

A comprehensive comparison between double patterning and double patterning with spacer on sub-50nm product implementation

C. F. Tseng, C. C. Yang, Elvis Yang, T. H. Yang, K. C. Chen, C. Y. Lu

Proceedings Volume 6924, 69241Y (2008) https://doi.org/10.1117/12.769904

KEYWORDS: Double patterning technology, Etching, Critical dimension metrology, Photomasks, Lithography, Overlay metrology, Optical lithography, Oxides, Manufacturing, Tolerancing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years