Dr. Chun Chieh Han Profile

Dr. Chun Chieh Han

at Taiwan Mask Corp

SPIE Involvement:

Author

Area of Expertise:

photomask , lithography , semiconductor

Publications (2)

Proceedings Article | 11 November 2022 Presentation

Chun Chieh Han

Proceedings Volume PC12293, PC122930G (2022) https://doi.org/10.1117/12.2641684

KEYWORDS: Critical dimension metrology, Reticles, Particles, Chromium, Etching

Proceedings Article | 16 September 2022 Paper

Hsiang Jen Yang, Po Sheng Wang, Chun Chieh Han, Yi Min Lin, Wen Wei Lee, Wei Shen Chen

Proceedings Volume 12325, 123250T (2022) https://doi.org/10.1117/12.2640527

KEYWORDS: Photomasks, Raster graphics, Reticles

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Keywords/Phrases