This paper introduces the automatic measurement system of laser scattering method based on angular resolution. Discuss the principle of laser in optical element surface scattering, propose the method which use angle resolved scattering (ARS) method to measure surface roughness, at the same time the measurement principle experimental platform is built based on the experimental results after verifying the correctness of the angle resolved scattering method.
In recent years, with the development of modern optics and laser technology, modern industry for optical surface roughness measurement precision of the increasingly high demand, real-time, fast and precise measurement of surface roughness has become constant subject of optical components in processing and test. In this paper, the current method of measuring the surface roughness of optical components were described in detail, including light scattering method, interferometric method, speckle method, and optical stylus method. Besides, the principles and characteristics of different methods were introduced respectively.
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