Dr. Danny Reuter Profile

Dr. Danny Reuter

at Technische Univ Chemnitz

SPIE Involvement:

Author

Publications (8)

Proceedings Article | 19 September 2018 Paper

Approach to combine electron-beam lithography and two-photon polymerization for enhanced nano-channels in network-based biocomputation devices

G. Heldt, Ch. Meinecke, S. Steenhusen, T. Korten, M. Groß, G. Domann, F. Lindberg, D. Reuter, St. Diez, H. Linke, St. Schulz

Proceedings Volume 10775, 1077517 (2018) https://doi.org/10.1117/12.2326598

KEYWORDS: Two photon polymerization, Electron beam lithography, Semiconducting wafers, Silicon, Etching, Photomasks, Network architectures, Gold, Chromium, Scanning electron microscopy

Read Abstract +

Proceedings Article | 21 May 2018 Paper

Plasmonic dipole nanoantennas on a SiO2/Si substrate and their characterization

Toni Haugwitz, Jens Erben, Niels Neumann, Danny Reuter, Dirk Plettemeier

Proceedings Volume 10686, 1068619 (2018) https://doi.org/10.1117/12.2306813

KEYWORDS: Nanoantennas, Near field optics, Optics manufacturing, Silicon, Plasmonics, Electromagnetism, Absorption, Silica

Read Abstract +

Proceedings Article | 28 September 2017 Paper

Challenges of nanostructure-integration in Fabry-Pérot interferometers as alternative to Bragg reflectors: an example for Match 1:1-, eBeam-, and nanoimprint lithography

Christian Helke, Karla Hiller, Jens Erben, Danny Reuter, Marco Meinig, Steffen Kurth, Christoph Nowak, Herberth Kleinjans, Thomas Otto

Proceedings Volume 10446, 104460J (2017) https://doi.org/10.1117/12.2279603

KEYWORDS: Reflectors, Nanoimprint lithography, Silicon, Interferometers, Surface enhanced Raman spectroscopy, Nanostructuring, Nanostructures, Electron beam lithography, Photoresist processing

Read Abstract +

Proceedings Article | 31 August 2017 Paper

Large-scale fabrication of LP-CVD Si3N4 photonic crystal structures as freestanding reflectors with 1 mm aperture for Fabry-Pérot interferometers

Christian Helke, Karla Hiller, Thomas Werner, Danny Reuter, Marco Meinig, Steffen Kurth, Christoph Nowak, Herberth Kleinjans, Thomas Otto

Proceedings Volume 10354, 1035403 (2017) https://doi.org/10.1117/12.2271683

KEYWORDS: Reflectors, Reflectivity, Photonic crystals, Microelectromechanical systems, Nanoimprint lithography, Nanostructuring, Manufacturing, Nanostructures, Interferometers, Microopto electromechanical systems

Read Abstract +

Proceedings Article | 21 May 2015 Paper

3D integration approaches for MEMS and CMOS sensors based on a Cu through-silicon-via technology and wafer level bonding

L. Hofmann, S. Dempwolf, D. Reuter, R. Ecke, K. Gottfried, S. Schulz, R. Knechtel, T. Geßner

Proceedings Volume 9517, 951709 (2015) https://doi.org/10.1117/12.2178598

KEYWORDS: Semiconducting wafers, Microelectromechanical systems, Wafer bonding, Glasses, Copper, Etching, CMOS technology, Sensors, Metals, Silicon

Read Abstract +

Proceedings Article | 1 July 2005 Paper

Post-processing gap reduction in a micromachined resonator for vacuum pressure measurement

Detlef Billep, Karla Hiller, Jorg Fromel, Dirk Tenholte, Danny Reuter, Wolfram Dotzel, Thomas Gessner

Proceedings Volume 5836, (2005) https://doi.org/10.1117/12.608312

KEYWORDS: Silicon, Semiconducting wafers, Resonators, Wafer bonding, Sensors, Etching, Electrodes, Deep reactive ion etching, Oxides, Aluminum

Read Abstract +

Proceedings Article | 23 February 2005 Paper

Selective adhesive bonding with SU-8 for zero-level-packaging

Danny Reuter, Andreas Bertz, Gunther Schwenzer, Thomas Gessner

Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.581829

KEYWORDS: Semiconducting wafers, Adhesives, Wafer bonding, Silicon, Sensors, Packaging, Coating, Aluminum, Interfaces, Silica

Read Abstract +

Proceedings Article | 16 January 2003 Paper

Mechanical reliabilty of MEMS fabricated by a special technology using standard silicon wafers

Christian Lohmann, Andreas Bertz, Matthias Kuechler, Danny Reuter, Thomas Gessner

Proceedings Volume 4980, (2003) https://doi.org/10.1117/12.472725

KEYWORDS: Silicon, Aluminum, Etching, Reliability, Semiconducting wafers, Metals, Photomasks, Sensors, Actuators, Microelectromechanical systems

Read Abstract +

Showing 5 of 8 publications

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years