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Dempsey Deng
at Coventor Inc A Lam Research Co
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Publications (1)
Proceedings Article | 10 April 2024 Poster + Paper
A study of bitline contact process variation on DRAM performance and DVC/BVC failures using virtual fabrication
Yujia Zhong, Qingpeng Wang, Dempsey Deng, Benjamin Vincent, Joseph Ervin
Proceedings Volume 12954, 129541G (2024) https://doi.org/10.1117/12.3010213
KEYWORDS: Critical dimension metrology, Etching, Diffractive optical elements, Fabrication, Windows, Cadmium, Silicon, Resistance, Virtual reality, Tolerancing
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