Dr. Dirk Caspary Profile

Dr. Dirk Caspary

at AMTC Dresden

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 28 September 2017 Paper

D. Caspary, S. Jähne, P. Nesladek, M. Kristlib, L. Bahrig, A. Feicke, M. Kaiser, J. Lorbeer, T. Wandel

Proceedings Volume 10446, 104460T (2017) https://doi.org/10.1117/12.2279699

KEYWORDS: Photomasks, Phase shifts, Electrochemical etching

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Keywords/Phrases