Donghoi Kim
at S&S Tech Co. Ltd.
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 22 November 2023 Presentation
Prashant Purwar, Donghoi Kim, Munsu Choi, Chulkyun Park, Byounghoon Seung, Yongdae Kim, Cheol Shin, Juhee Hong
Proceedings Volume PC12750, PC127500L (2023) https://doi.org/10.1117/12.2685949
KEYWORDS: Pellicles, Extreme ultraviolet, Extreme ultraviolet lithography, Photomasks, Transmittance, Thin films, Semiconductors, Particles, Lithography, Industry

Proceedings Article | 11 November 2022 Presentation
Proceedings Volume PC12292, PC122920E (2022) https://doi.org/10.1117/12.2641755
KEYWORDS: Pellicles, Extreme ultraviolet lithography, Extreme ultraviolet, Transmittance, Yield improvement, Spectroscopy, Semiconductors, Semiconducting wafers, Photomasks, Particles

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