Unspecified Ellaheh Barzegar Profile

Ellaheh Barzegar

at ASML Netherlands B.V.

SPIE Involvement:

Author

Publications (2)

Proceedings Article | 10 April 2024 Poster + Paper

Local variables measured using large field of view SEM images

Salman Mokhlespour, Ellaheh Barzegar, Willem van Mierlo, Zoi Dardani, Peter Sprau

Proceedings Volume 12955, 129551Y (2024) https://doi.org/10.1117/12.3006277

KEYWORDS: Line edge roughness, Line width roughness, Semiconducting wafers, Scanning electron microscopy, Distortion, Stochastic processes, Metrology, Bias correction, Error analysis

Read Abstract +

Proceedings Article | 1 December 2022 Presentation + Paper

Early defect detection for EUV self-aligned litho-etch litho-etch patterning with EPE

Roy Anunciado, Jisun Lee, Ellaheh Barzegar, Stefan van der Sanden, Guillaume Schelcher, Stijn Schoofs

Proceedings Volume 12292, 122920J (2022) https://doi.org/10.1117/12.2637772

KEYWORDS: Line edge roughness, Etching, Semiconducting wafers, Optical lithography, Critical dimension metrology, Amorphous silicon, Scanning electron microscopy, Dielectrics, Overlay metrology, Photomasks

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years