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Fei Tao
at Luoyang Optoelectro Technology Development Ctr
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Publications (3)
Proceedings Article | 27 March 2022 Paper
Preparation and etching of the mask of the type II superlattice for focal plane arrays
Proceedings Volume 12169, 121696B (2022) https://doi.org/10.1117/12.2624742
KEYWORDS: Etching, Superlattices, Refractive index, Silica, Plasma enhanced chemical vapor deposition, Ions, Molecules, Infrared detectors, Silicon films, Plasma
Proceedings Article | 5 November 2020 Paper
Inductively coupled plasma (ICP) dry etching of type II InAs/GaSb superlattice for focal plane arrays
Fei Tao, Xubo Zhu, JinChun Wang, Yingjie He, Jiaxin Ding, Guansheng Yao, Lixue Zhang, Xiancun Cao, Yanqiu Lv
Proceedings Volume 11565, 115650I (2020) https://doi.org/10.1117/12.2575638
KEYWORDS: Etching, Chlorine, Superlattices, Dry etching, Gallium antimonide, Sensors, Staring arrays, Plasma etching, Wet etching
Proceedings Article | 18 December 2014 Paper
Infrared transparent conductive films
Fei Tao, Wei-guo Sun, Liang Zhang, Li-wen Wang, Lei Zhang, Xu-bo Zhu
Proceedings Volume 9295, 929508 (2014) https://doi.org/10.1117/12.2072889
KEYWORDS: Sputter deposition, Copper, Oxygen, Aluminum, Transparent conducting films, Argon, Infrared radiation, Resistance, FT-IR spectroscopy, Thin films
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