Dr. Gergely Huszka
at XRnanotech
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 18 April 2021 Presentation
Gergely Huszka, Florian Döring, Florian Sander, Frieder Koch, Vitaliy Guzenko, Christian David
Proceedings Volume 11776, 117760F (2021) https://doi.org/10.1117/12.2592585
KEYWORDS: Zone plates, Resolution enhancement technologies, X-ray optics, Fabrication, Atomic layer deposition, Microscopy, Image resolution, X-rays, X-ray microscopy, X-ray imaging

Proceedings Article | 5 March 2021 Presentation + Paper
Proceedings Volume 11697, 116970P (2021) https://doi.org/10.1117/12.2583149
KEYWORDS: Microelectromechanical systems, Camera shutters, Wafer-level optics, Silica, Modulation, Waveguides, Vapor etching, Spectrometers, Silicon, Semiconducting wafers

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