Mr. Giuseppe Y. H. Mak Profile

Giuseppe Y. H. Mak

SPIE Involvement:

Author

Publications (2)

SPIE Journal Paper | 1 January 2005

Alternating phase-shifting mask design for low aberration sensitivity

Giuseppe Mak, Alfred Wong, Edmund Lam

JM3, Vol. 4, Issue 01, 013008, (January 2005) https://doi.org/10.1117/12.10.1117/1.1861732

KEYWORDS: Monte Carlo methods, Error analysis, Phase shifts, Critical dimension metrology, Photomasks, Coherence imaging, Wavefronts, Light sources, Resolution enhancement technologies, Zernike polynomials

Read Abstract +

Proceedings Article | 28 May 2004 Paper

Alternating phase-shifting mask design for low aberration sensitivity

Giuseppe Mak, Alfred Wong, Edmund Lam

Proceedings Volume 5377, (2004) https://doi.org/10.1117/12.534686

KEYWORDS: Error analysis, Monte Carlo methods, Phase shifts, Photomasks, Coherence imaging, Image analysis, Critical dimension metrology, Wavefronts, Statistical analysis, Resolution enhancement technologies

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years