Hideaki Kawashima
Section Manager and Sales Representative at Hakuto Co Ltd
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 14 November 2007 Paper
T. Umeda, H. Kawashima, T. Miho, K. Moriya
Proceedings Volume 6730, 67304Q (2007) https://doi.org/10.1117/12.746358
KEYWORDS: Air contamination, Polymethylmethacrylate, Neodymium, Photomasks, Polymers, Carbon, Ions, Chemical analysis, Particle filters, Composites

Proceedings Article | 9 November 2005 Paper
Atsushi Nobe, Hideaki Kawashima, Akinori Kurikawa, Hisashi Kasahara, Fumiko Ohta, Yasushi Okubo
Proceedings Volume 5992, 59924B (2005) https://doi.org/10.1117/12.632556
KEYWORDS: Reticles, Particles, Photomasks, Data storage, Contamination, Optical properties, Inspection, Polymethylmethacrylate, Adhesives, Air contamination

Proceedings Article | 28 June 2005 Paper
Proceedings Volume 5853, (2005) https://doi.org/10.1117/12.617128
KEYWORDS: Reticles, Particles, Photomasks, Contamination, Inspection, Scanners, Glasses, Air contamination, Polymers, Adhesives

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top