Ms. Hsiao-Hsuan Liu Profile

Hsiao-Hsuan Liu

PhD student

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Publications (2)

Proceedings Article | 28 April 2023 Presentation + Paper

Design-technology co-optimization overview of CFET architecture

G. Mirabelli, P. Schuddinck, H.-H. Liu, S. Yang, O. Zografos, S. Salahuddin, P. Weckx, G. Hiblot, G. Hellings, J. Ryckaert

Proceedings Volume 12495, 124950M (2023) https://doi.org/10.1117/12.2657726

KEYWORDS: Semiconducting wafers, Back end of line, Nanosheets, Logic, Standards development, Metals, Fin field effect transistors, Semiconductors, Optical lithography, Nanotechnology

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Proceedings Article | 28 April 2023 Presentation + Paper

DTCO of sequential and monolithic CFET SRAM

Hsiao-Hsuan Liu, Shairfe Salahuddin, Boon Teik Chan, Pieter Schuddinck, Yang Xiang, Pieter Weckx, Geert Hellings, Francky Catthoor

Proceedings Volume 12495, 124950Z (2023) https://doi.org/10.1117/12.2657524

KEYWORDS: Fin field effect transistors, Silicon, Back end of line, Design rules, Metals, Transistors, Resistance, Fabrication, Epitaxy, Nanosheets

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