Mr. Iosif E. Clemente Profile

Iosif E. Clemente

at Ioffe Institute

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Publications (3)

Proceedings Article | 15 March 2019 Paper

Influence of annealing on nanocrystalline LiNbO3 films properties

Viktor Klimin, Zakhar Vakulov, Roman Tominov, Yuriy Varzarev, Iosif Clemente, Andrew Miakonkikh, Konstantin Rudenko, Oleg Ageev

Proceedings Volume 11022, 110221E (2019) https://doi.org/10.1117/12.2522316

KEYWORDS: Annealing, Oxygen, Surface roughness, Scanning electron microscopy, Absorption, Oxides, Fabrication, Atmospheric modeling, Atmospheric optics, Acousto-optics

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Proceedings Article | 30 December 2016 Paper

Low-damage plasma etching of porous low-k films in CF3Br and CF4 plasmas under low-temperature conditions

A. Miakonkikh, I. Clemente, A. Vishnevskiy, K. Rudenko, M. Baklanov

Proceedings Volume 10224, 1022420 (2016) https://doi.org/10.1117/12.2267113

KEYWORDS: Cryogenics, Plasma etching, Plasma, Dielectrics, Etching, Bromine, FT-IR spectroscopy, Polymers, Fluorine, Diffusion

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Proceedings Article | 30 December 2016 Paper

Application of spectral ellipsometry to in situ diagnostics of atomic layer deposition of dielectrics on silicon and AlGaN

Iosif Clemente, Andrey Miakonkikh

Proceedings Volume 10224, 1022425 (2016) https://doi.org/10.1117/12.2266634

KEYWORDS: Ellipsometry, Atomic layer deposition, Dielectrics, Silicon, Temperature metrology, Oxides, Aluminum, Plasma, Gallium nitride, Semiconducting wafers

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