Dr. Jan P. Heumann
Member of Technical Staff at Advanced Mask Technology Ctr GmbH Co KG
SPIE Involvement:
Author
Publications (28)

Proceedings Article | 27 June 2019 Paper
Masashi Yonetani, Karen Badger, Jed Rankin, Shinji Akima, Yusuke Toda, Itaru Yoshida, Masayuki Kagawa, Takeshi Isogawa, Yutaka Kodera, Jan Heumann, Anka Birnstein
Proceedings Volume 11178, 111780D (2019) https://doi.org/10.1117/12.2537430
KEYWORDS: Inspection, Extreme ultraviolet, Defect inspection, Photomasks, Opacity, Optical inspection, Signal detection, Critical dimension metrology, Extreme ultraviolet lithography, Defect detection

Proceedings Article | 12 October 2018 Presentation
Proceedings Volume 10810, 1081007 (2018) https://doi.org/10.1117/12.2503808
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, EUV optics, Extreme ultraviolet lithography, Lithography, Semiconducting wafers, Wafer-level optics, Defect detection, Optical inspection

Proceedings Article | 3 October 2018 Presentation + Paper
Karen Badger, Masashi Yonetani, Yusuke Toda, Masayuki Kagawa, Takeshi Isogawa, Jan Heumann
Proceedings Volume 10810, 1081008 (2018) https://doi.org/10.1117/12.2502560
KEYWORDS: Inspection, Polarization, Extreme ultraviolet, Photomasks, Optical inspection, Defect detection, Semiconducting wafers, EUV optics, Defect inspection, Inspection equipment

Proceedings Article | 12 June 2018 Paper
Proceedings Volume 10807, 108070D (2018) https://doi.org/10.1117/12.2502006
KEYWORDS: Inspection, Photomasks, Extreme ultraviolet, Polarization, Opacity, Defect detection, EUV optics, Deep ultraviolet, Defect inspection, Critical dimension metrology

Proceedings Article | 8 November 2012 Paper
Jan Heumann, Albrecht Ullrich, Clemens Utzny, Stefan Meusemann, Frank Kromer, John Whittey, Edgardo Garcia, Mark Wagner, Norbert Schmidt
Proceedings Volume 8522, 85220G (2012) https://doi.org/10.1117/12.977248
KEYWORDS: Critical dimension metrology, Photomasks, Inspection, Semiconducting wafers, Scanning electron microscopy, Optical testing, Electron microscopes, Opacity, Manufacturing, Wafer manufacturing

Showing 5 of 28 publications
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