Ms. Jie Hu Profile

Jie Hu

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Proceedings Article | 31 January 2013 Paper

Data processing of vertical scanning white-light interferometry based on particle swarm optimization

Jie Hu, Changcai Cui, Hui Huang, Ruifang Ye

Proceedings Volume 8759, 875902 (2013) https://doi.org/10.1117/12.2014454

KEYWORDS: Particle swarm optimization, Particles, Data processing, Interferometry, Light sources, Error analysis, Ferroelectric materials, 3D metrology, Algorithms, Bismuth

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In order to precisely locate the position of zero optical path difference (ZOPD) between the measuring light beam and the reference light beam in Vertical Scanning White-light Interferometer and then realize accurate surface measurement, the Particle Swarm Optimization (PSO) was used to process the interferometry data captured by a CCD camera. The envelope line of series of intensities of every pixel was supposed to be approximated by a Gaussian curve first. Then its parameters were optimized to find the best Gaussian curve as well as the position of ZOPD by the PSO with an objective function which minimized the residual sum of squares between the measured data and theoretical fitting curve. Finally, the measured surface can be reconstructed according to a series of best positions of ZOPD obtained by the proposed method. The simulation data and sampled data of two standard samples with different kinds of reticles from repetitive test show that the PSO is suitable for precisely locating the ZOPD with low requirements of step sampling and a small amount of pictures. Therefore, without reducing the precision, the PSO can be used in data processing of the white-light interferometry system with relatively low requirements for stepping hardware.

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