Jun Li
at Shanghai Institute of Microsystem and Information Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 5 January 2017 Paper
Jun Li, Chao Qiu, Xin Chen, Zhen Sheng, Aimin Wu, Fuwan Gan
Proceedings Volume 10244, 1024429 (2017) https://doi.org/10.1117/12.2266336
KEYWORDS: Silicon, Diffraction gratings

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