We have developed a unique miniature confocal optical scanning microscope as an endoscopic application and successfully obtained a real time image. The confocal microscope can observe the longitudinal direction of a scanning head including the electrostatic 2-D MEMS scanner and an aspherical objective lens. Waterproof packaging of the scanning head is accomplished. The MEMS scanner and the objective lens in the head are assembled precisely and compactly. The MEMS scanner has a gimbal structure and the mirror flatness and Q factor are controlled by a stress-controlled silicon nitride. The scan angle of 12deg., the mirror flatness of 80nm(PV) and the mirror reflectance of over 85% are achieved. The diameter and length of the scanning head are 3.3mm and 8mm, respectively and it can insert into a channel of the endoscope. The lateral resolution of 0.5um, the depth resolution of 2.9um, the field of view of 100*75um and over 20/s of frame rate needed for the in-vivo inspection was achieved.
Conference Committee Involvement (14)
Endoscopic Microscopy XIV
2 February 2019 | San Francisco, California, United States
Endoscopic Microscopy XIII
27 January 2018 | San Francisco, California, United States
Endoscopic Microscopy XII
29 January 2017 | San Francisco, California, United States
Endoscopic Microscopy XI
14 February 2016 | San Francisco, California, United States
Endoscopic Microscopy X
8 February 2015 | San Francisco, California, United States
Endoscopic Microscopy IX
2 February 2014 | San Francisco, California, United States
Endoscopic Microscopy VIII
3 February 2013 | San Francisco, California, United States
Endoscopic Microscopy VII
22 January 2012 | San Francisco, California, United States
Endoscopic Microscopy VI
23 January 2011 | San Francisco, California, United States
Endoscopic Microscopy V
25 January 2010 | San Francisco, California, United States
Endoscopic Microscopy IV
25 January 2009 | San Jose, California, United States
Endoscopic Microscopy III
20 January 2008 | San Jose, California, United States
Endoscopic Microscopy II
21 January 2007 | San Jose, California, United States
Endoscopic Microscopy
22 January 2006 | San Jose, California, United States
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