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Yasheng Liu
at Heilongjiang Institute of Technology
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Publications (1)
Proceedings Article | 19 November 2019 Paper
Investigation on UV solid-state nanosecond laser micromachining of microstructures on sapphire wafer
Proceedings Volume 11183, 1118305 (2019) https://doi.org/10.1117/12.2537530
KEYWORDS: Ultraviolet radiation, Solid state lasers, Laser ablation, Solid state electronics, Micromachining, Sapphire, Semiconducting wafers, Laser energy, Sapphire lasers, Finite element methods
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