M. M. Guk
at Bauman Moscow State Technical Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 31 January 2022 Paper
Proceedings Volume 12157, 121571G (2022) https://doi.org/10.1117/12.2622386
KEYWORDS: Molybdenum, Silicon, Sapphire, Sputter deposition, Atomic force microscopy, Thin films, Thin film deposition, Deposition processes

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