Dr. Marcus Wolf
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 28 April 2023 Paper
Proceedings Volume 12495, 124951V (2023) https://doi.org/10.1117/12.2661150
KEYWORDS: Data modeling, Semiconducting wafers, Metrology, Modeling, Machine learning, Fabrication, Data processing, Semiconductors, Process modeling, Deposition processes

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