Dr. Mehdi Vaez-Iravani Profile

Dr. Mehdi Vaez-Iravani

VP of Technology at KLA Corp

SPIE Involvement:

Author

Publications (7)

Proceedings Article | 30 March 1995 Paper

Near-field microscopy of thin films: application to polymeric structures

Mehdi Vaez-Iravani, Ricardo Toledo-Crow, Harald Ade, R. Spontak

Proceedings Volume 2384, (1995) https://doi.org/10.1117/12.205926

KEYWORDS: Birefringence, Polymers, Near field optics, Near field, Microscopes, Liquid crystals, Optical fibers, Near field scanning optical microscopy, Image resolution, Silicon

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Proceedings Article | 1 May 1994 Paper

Near-field optical microscopy characterization of IC metrology

Ricardo Toledo-Crow, Bruce Smith, Jon Rogers, Mehdi Vaez-Iravani

Proceedings Volume 2196, (1994) https://doi.org/10.1117/12.174165

KEYWORDS: Near field scanning optical microscopy, Optical microscopy, Metrology, Microscopy, Scanning electron microscopy, Metals, Glasses, Diffraction, Microscopes, Near field optics

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Proceedings Article | 4 August 1993 Paper

Characterization of atomic force microscopy and electrical probing techniques for IC metrology

Ricardo Toledo-Crow, Mehdi Vaez-Iravani, Bruce Smith, Joseph Summa

Proceedings Volume 1926, (1993) https://doi.org/10.1117/12.148946

KEYWORDS: Atomic force microscopy, Metrology, Atomic force microscope, Glasses, Calibration, Prisms, Tungsten, Silicon, Scanners, Interferometry

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SPIE Journal Paper | 1 August 1993

Detection of high- and low-frequency vibrations using a feedback-stabilized differential fiber optic interferometer

Mehdi Vaez-Iravani, M. Nonnenmacher, H. Kumar Wickramasinghe

OE, Vol. 32, Issue 08, (August 1993) https://doi.org/10.1117/12.10.1117/12.143338

KEYWORDS: Fiber optics, Interferometers, Signal detection, Modulators, Silicon, Michelson interferometers, Reflectivity, Calibration, Feedback loops, Heterodyning

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Proceedings Article | 4 June 1993 Paper

Imaging modes and contrast in near-field scanning optical microscopy

Ricardo Toledo-Crow, Mehdi Vaez-Iravani

Proceedings Volume 1855, (1993) https://doi.org/10.1117/12.146364

KEYWORDS: Near field scanning optical microscopy, Signal detection, Near field, Polarization, Microscopy, Diffraction, Near field optics, Imaging systems, Phase contrast, Scanning probe microscopy

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Proceedings Article | 1 May 1992 Paper

Atomic-force-regulated near-field scanning optical microscope

Ricardo Toledo-Crow, Yue Chen, Mehdi Vaez-Iravani

Proceedings Volume 1639, (1992) https://doi.org/10.1117/12.58192

KEYWORDS: Near field scanning optical microscopy, Near field optics, Atomic force microscopy, Scanning probe microscopy, Blood, Optical microscopes, Microscopes, Thin films, Integrated circuits, Microscopy

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Proceedings Article | 1 June 1990 Paper

Quantitative linewidth measurement using in-situ differential SEM techniques

Albert Sicignano, Mehdi Vaez-Iravani

Proceedings Volume 1261, (1990) https://doi.org/10.1117/12.20077

KEYWORDS: Line scan image sensors, Scanning electron microscopy, Metrology, Silicon, Optical alignment, Integrated circuits, Inspection, Process control, Photoresist materials, Electron microscopes

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Showing 5 of 7 publications

Proceedings Volume Editor (1)

SPIE Conference Volume | 30 March 1995

Scanning Probe Microscopies III

Conference Committee Involvement (1)

Scanning Probe Microscopies III

6 February 1995 | San Jose, CA, United States

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