Ms. Melissa A. Gresham Profile

Melissa A. Gresham

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

An overview of semiconductor industry efforts to reduce PFAS use and emissions in plasma processes

Laurie Beu, Melissa Gresham

Proceedings Volume 12958, 129580M (2024) https://doi.org/10.1117/12.3013226

KEYWORDS: Semiconductors, Industry, Plasma, Plasma etching, Gases, Etching, Vacuum chambers, Semiconductor manufacturing, Climate change, Manufacturing

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