Nanoimprint lithography is a large area, high resolution and cost-effective replication technology for micro- and nanostructures. An interesting possibility in the nanoimprint process is the use of materials that remain a functional part of the final component or device. Such an additive approach offers interesting opportunities in terms of novel applications but also cost reduction and could also contribute to sustainability aspects. This paper is aiming at providing a short noncomprehensive overview on the direct patterning of various functional materials by using NIL for optics and life science applications.
Publisher’s Note: This paper, originally published on 29 August 2019, was replaced with a corrected/revised version on 24 February 2020. If you downloaded the original PDF but are unable to access the revision, please contact SPIE Digital Library Customer Service for assistance.
In this work, we describe an effective and simple method for surface patterning of 3D objects with antireflective moth-eye structures via UV based nanoimprint lithography using soft stamps. So-called anti-reflective moth-eye structures are subwavelength nanostructures that can reduce the reflection of surfaces over the entire visible spectrum of light. Such broadband antireflective coatings are especially interesting for optical elements like lenses.
A novel technique to realize large quantities of stacked multifunctional anisotropic nanoparticles with narrow size distribution is presented. Through the combination of Ultraviolet Nano-Imprint Lithography (UV-NIL), physical vapor deposition and subsequent lift-off processes we fabricate and disperse these particles in solution for the use in biomolecular sensing applications. Compared to chemical nanoparticle synthesis our approach holds several advantages. First, one can control the nanoparticle shape by choosing an appropriate nanopattern for the UV-NIL process. Second, we can choose the composition of the nanoparticles as the materials are deposited layer-wise by sputter deposition. Third, we can fabricate nanoparticles with very small geometrical variations. This is in contrast to chemical synthesis methods where the layer thicknesses and particle size distribution are harder to control.
In this manuscript, a technique to realize multifunctional anisotropic nanoparticles with small size distribution in large quantities is presented. The fabrication of the nanoparticles is based on Ultraviolet Nanoimprint Lithography (UV-NIL), physical vapor deposition and lift-off processes in order to finally disperse the nanoparticles in solution. The particles are designed for in-vitro biomolecular diagnostics. The underlying homogeneous biomolecular sensing method is based on the optical detection of changes in the rotational dynamics of anisotropic hybrid nanoparticles immersed in the sample solution, such as blood. [1], [2] This approach requires highly monodisperse nanoparticles in order to achieve a high sensitivity in molecule detection. The fabrication method based on UV-NIL and lift-off processes holds several advantages compared to chemical synthesized nanoparticles, like very small size variations and engineering freedom in particle geometry. We demonstrate the fabrication of elliptical particles with an area size of 1,557 × 10^(-12)m2 ±3%.
We are investigating the possibilities and the technical requirements to do nanopatterning on arbitrary curved surfaces. This is done considering the opportunities and possibilities of additive manufacturing. One of the key elements is the necessity to deposit material in well-defined areas of various complex 3D objects. In order to achieve this we are developing a robot-based inkjet printing. We report on our progress with this respect and also on our efforts to perform nanoimprinting on curved, possibly 3D-printed objects using materials that can be deposited by inkjet printing. In the framework of this article, we provide an overview over our current status, the challenges and an outlook.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.