Dr. Nobutoshi Fujii Profile

Dr. Nobutoshi Fujii

at Millennium Research for Advanced Information Techn

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Publications (3)

Proceedings Article | 17 November 2005 Paper

Fabrication of mesoporous silica for ultra-low-k interlayer dielectrics

Nobutoshi Fujii, Kazuo Kohmura, Takahiro Nakayama, Hirofumi Tanaka, Nobuhiro Hata, Yutaka Seino, Takamaro Kikkawa

Proceedings Volume 6002, 60020N (2005) https://doi.org/10.1117/12.633597

KEYWORDS: Silica, Dielectrics, Silicon, Cesium, Plasma treatment, Refractive index, Sol-gels, Carbon, Head-mounted displays, Transmission electron microscopy

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Proceedings Article | 17 November 2005 Paper

Self-assembled porous silica/Cu damascene interconnects for 45nm node and beyond

T. Kikkawa, R. Yagi, S. Chikaki, M. Shimoyama, T. Ono, N. Fujii, K. Kohmura, H. Tanaka, T. Nakayama, A. Ishikawa, H. Matsuo, Y. Sonoda, N. Hata, Y. Seino, T. Yoshino, K. Kinoshita

Proceedings Volume 6002, 60020M (2005) https://doi.org/10.1117/12.632119

KEYWORDS: Silica, Copper, Dielectrics, Chemical mechanical planarization, Electroplating, Plasma etching, Silicon, Semiconducting wafers, Chemical reactions, Metals

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Proceedings Article | 19 January 2005 Paper

Self-assembled ultra-low-k porous silica films for 45-nm technology node

Takamaro Kikkawa, Y. Oku, K. Kohmura, N. Fujii, H. Tanaka, A. Ishikawa, H. Matsuo, Y. Sonoda, H. Miyoshi, T. Goto, N. Hata, Y. Seino, S. Takada, T. Yoshino, K. Kinoshita

Proceedings Volume 5592, (2005) https://doi.org/10.1117/12.571092

KEYWORDS: Silica, Dielectrics, Copper, Silicon, Oxides, Semiconducting wafers, Head-mounted displays, Bioalcohols, Back end of line, Transmission electron microscopy

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