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Olivier ROULE
at STMicroelectronics
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Author
Publications (1)
Proceedings Article | 20 October 2016 Paper
Industrial implementation of spatial variability control by real-time SPC
O. Roule, F. Pasqualini, M. Borde
Proceedings Volume 10032, 100320P (2016) https://doi.org/10.1117/12.2249567
KEYWORDS: Process control, Semiconducting wafers, Control systems, Metrology, 3D modeling, Reconstruction algorithms, 3D metrology, Lead, Manufacturing, 3D displays
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