Dr. Patrick Salg Profile

Dr. Patrick Salg

at Carl Zeiss SMT GmbH

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Publications (1)

Proceedings Article | 5 October 2023 Paper

EUV mask defect inspection for the 3nm technology node

Yannick Hermans, Tilmann Heil, Renzo Capelli, Bartholomaeus Szafranek, Daniel Rhinow, Gerson Mette, Patrick Salg, Christian Felix Hermanns, Bappaditya Dey, Luc Halipre, Darko Trivkovic, Paulina Rincon Delgadillo, Thomas Marschner, Sandip Halder

Proceedings Volume 12802, 128020H (2023) https://doi.org/10.1117/12.2678392

KEYWORDS: Extrusion, Extreme ultraviolet, Semiconducting wafers, Critical dimension metrology, Scanning electron microscopy, Extreme ultraviolet lithography, Lithography, Defect inspection

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