Dr. Qiangxiang Peng Profile

Dr. Qiangxiang Peng

at UESTC

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Publications (1)

Proceedings Article | 8 September 2011 Paper

Study of PZT thick-film infrared detectors prepared by MEMS technology

Xiang-Peng Qiang, Gui-Wu Chuan, Bo-Luo Wen, Li-Zhang Wan, Qiang-Cao Jia

Proceedings Volume 8193, 81934J (2011) https://doi.org/10.1117/12.901859

KEYWORDS: Ferroelectric materials, Silicon, Microelectromechanical systems, Infrared detectors, Silicon films, Sensors, Printing, Electrodes, Etching, Chemical elements

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