Dr. Qingpeng Wang
at Lam Research China
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 10 April 2024 Poster + Paper
Yujia Zhong, Qingpeng Wang, Dempsey Deng, Benjamin Vincent, Joseph Ervin
Proceedings Volume 12954, 129541G (2024) https://doi.org/10.1117/12.3010213
KEYWORDS: Critical dimension metrology, Etching, Diffractive optical elements, Fabrication, Windows, Cadmium, Silicon, Resistance, Virtual reality, Tolerancing

Proceedings Article | 10 April 2024 Poster + Paper
Qingpeng Wang, Yu Jia Zhong, Timothy Yang, Lifei Sun, Pengfei Lyu, Benjamin Vincent, Ivan Chakarov, Joseph Ervin
Proceedings Volume 12954, 129541D (2024) https://doi.org/10.1117/12.3010206
KEYWORDS: Line edge roughness, Etching

Proceedings Article | 25 May 2022 Presentation + Paper
Qingpeng Wang, Benjamin Vincent, Joseph Ervin
Proceedings Volume 12055, 120550M (2022) https://doi.org/10.1117/12.2613613
KEYWORDS: Critical dimension metrology, Line edge roughness, Diffractive optical elements, Cadmium, Semiconducting wafers, Overlay metrology, Head, Silicon, Metrology, Virtual reality

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