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Dr. Robert D. McKeag
Technical Director at Centronic Ltd
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Author
Publications (2)
Proceedings Article | 29 June 2001 Paper
Diamond-based deep-UV sensors for lithography applications
Michael Whitfield, Stuart Lansley, Olivier Gaudin, Robert McKeag, Nadeem Rizvi, Richard Jackman
Proceedings Volume 4274, (2001) https://doi.org/10.1117/12.432534
KEYWORDS: Sensors, Diamond, Lithography, Excimer lasers, Pulsed laser operation, Silicon, Photodetectors, Visible radiation, Chemical vapor deposition, Deep ultraviolet
Proceedings Article | 20 October 1998 Paper
Diamond photodetectors for UV laser-based applications
Robert McKeag, Richard Jackman
Proceedings Volume 3484, (1998) https://doi.org/10.1117/12.328206
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