A new film thickness sensor material, single crystal gallium orthophosphate (GaPO4), has been investigated for use as a high temperature piezoelectric microbalance suitable for monitoring chemical vapor deposition (CVD) thin film processes. Our initial work has shown that gallium phosphate can operate at temperatures up to 930°C, and a reusable sensor housing can be constructed to hold the crystal for repeated runs. A significant shortcoming is that commercial film thickness monitors are not capable of accurately controlling GaPO4 above 600°C due to the limitations of the oscillator electronics used in such monitors.
Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.