Mr. Sheng-Hsin Sun Profile

Sheng-Hsin Sun

at Taiwan Mask Corp.

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 22 November 2023 Poster

Hsiang Jen Yang, Po-Sheng Wang, Yen-Hao Chen, Sheng-Hsin Sun, Ting-Ching Hu, Chia-Wei Lin, Lance Lin

Proceedings Volume PC12751, PC127510X (2023) https://doi.org/10.1117/12.2687188

KEYWORDS: Critical dimension metrology, Beam path, Error control coding, Photoresist materials, Integration, Etching, Design and modelling

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Keywords/Phrases