Dr. Sumant Sarkar Profile

Dr. Sumant Sarkar

at Coventor Inc A Lam Research Co

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation + Paper

The effect of metal gate recess profile on FinFET performance

Pradeep Nanja, Brett Lowe, Sumant Sarkar

Proceedings Volume 12954, 1295402 (2024) https://doi.org/10.1117/12.3010192

KEYWORDS: Resistance, Fin field effect transistors, Capacitance

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SPIE Journal Paper | 12 July 2023 Open Access

Review of virtual wafer process modeling and metrology for advanced technology development

Michael Hargrove, Sandy Wen, Daebin Yim, Kira Egelhofer Ruegger, Pradeep Nanja, Sumant Sarkar, Brett Lowe, Benjamin Vincent, Joseph Ervin, David Fried

JM3, Vol. 22, Issue 03, 031209, (July 2023) https://doi.org/10.1117/12.10.1117/1.JMM.22.3.031209

KEYWORDS: Etching, Metrology, Process modeling, Semiconducting wafers, 3D modeling, 3D metrology, Logic, Critical dimension metrology, Diffractive optical elements, Fabrication

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