CONFERENCE PROCEEDINGS
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Sundararajan Thirumalai
at imec
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Publications (2)
Proceedings Article | 7 August 2023 Presentation
Nanoimprint-based pattern transfer to 300 mm substrates
Matthew Traub, Myriam Willegms, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, Eleonora Storace
Proceedings Volume 12624, 126240E (2023) https://doi.org/10.1117/12.2675915
KEYWORDS: Optical lithography, Semiconducting wafers, Nanoimprint lithography, Metrology, Manufacturing, Flat optics, Etching, Dielectrics, Deep ultraviolet
Proceedings Article | 16 March 2023 Presentation + Paper
Scalable patterning modules for diffractive optics on 300mm substrates
Matthew Traub, Myriam Willegems, Sundararajan Thirumalai, Steve Smout, Mohamed Asbahi, Bogumila Kutrzeba-Kotowska, Silvia Lenci, Eleonora Storace
Proceedings Volume 12449, 1244904 (2023) https://doi.org/10.1117/12.2649739
KEYWORDS: Semiconducting wafers, Glasses, Optical lithography, Silicon, Silicon nitride, Nanoimprint lithography, Etching, Fabrication, Electron beam lithography, Deep ultraviolet
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