Sylvain G. Muckenhirn
President
SPIE Involvement:
Author
Publications (8)

Proceedings Article | 24 March 2016 Paper
Proceedings Volume 9778, 97780R (2016) https://doi.org/10.1117/12.2220592
KEYWORDS: Sensors, Microscopy, Graphene, Polarization, Visualization, Process control, Nanomaterials, Coating, Optical imaging, Image resolution, Precision measurement, Carbon nanotubes, DNA nanotechnology, Nano coatings, Nanobiotechnology, Silicon, Image sensors, Image visualization, Atomic force microscopy

Proceedings Article | 10 July 2003 Paper
John Allgair, Victor Boksha, Benjamin Bunday, Alain Diebold, Daniel Cole, Mark Davidson, Jerry Hutcheson, Andrew Gurnell, David Joy, John McIntosh, Sylvain Muckenhirn, Joseph Pellegrini, Robert Larrabee, James Potzick, Andras Vladar, Nigel Smith, Alexander Starikov, Neal Sullivan, Oliver Wells
Proceedings Volume 5042, (2003) https://doi.org/10.1117/12.504320
KEYWORDS: Metrology, Diagnostics, Dimensional metrology, Optical lithography, Manufacturing, Process control, Image processing, Critical dimension metrology, Semiconducting wafers, Edge roughness

Proceedings Article | 22 August 2001 Paper
Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436742
KEYWORDS: Photomasks, Scanning probe microscopy, Quartz, Phase shifts, Chromium, Semiconducting wafers, Etching, Silicon, Capillaries, Computer aided design

Proceedings Article | 22 August 2001 Paper
Kelvin Walch, A. Meyyappan, Sylvain Muckenhirn, Jacques Margail
Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436800
KEYWORDS: Critical dimension metrology, Scanning probe microscopes, Edge roughness, Scanning probe microscopy, Metrology, Etching, Semiconductor manufacturing, Semiconductors, Manufacturing, Control systems

Proceedings Article | 22 August 2001 Paper
Proceedings Volume 4344, (2001) https://doi.org/10.1117/12.436801
KEYWORDS: Scanning probe microscopy, Surface roughness, Scanning electron microscopy, Edge roughness, Semiconductor manufacturing, Scanning probe microscopes, Atomic force microscope, Atomic force microscopy, Line edge roughness, Servomechanisms

Showing 5 of 8 publications
SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top