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Tadashi Nagayama
at Nikon Corp
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Publications (4)
Proceedings Article | 10 April 2024 Poster + Paper
High-accuracy wafer topography sensor using optical spectroscopy and correction based on an optical model
Proceedings Volume 12955, 1295525 (2024) https://doi.org/10.1117/12.3009791
KEYWORDS: Semiconducting wafers, Optical sensors, Film thickness, Wafer bonding, Optical alignment, Deformation, Sensors
Proceedings Article | 24 May 2004 Paper
Advanced alignment optical system for DUV scanner
Tadashi Nagayama, Masahiko Yasuda, Yuho Kanaya, Takahiro Masada, Ayako Sugaya
Proceedings Volume 5375, (2004) https://doi.org/10.1117/12.535083
KEYWORDS: Optical alignment, Wavefront aberrations, Semiconducting wafers, Optics manufacturing, Reflectivity, Scanners, Monochromatic aberrations, Objectives, Wafer-level optics, Deep ultraviolet
Proceedings Article | 2 June 2003 Paper
New method to reduce alignment error by optical system
Proceedings Volume 5038, (2003) https://doi.org/10.1117/12.483513
KEYWORDS: Optical alignment, Semiconducting wafers, Monochromatic aberrations, Neodymium, Microscopes, Spatial frequencies, Reflectivity, Chemical mechanical planarization, Phase shifts, Image analysis
Proceedings Article | 30 July 2002 Paper
Innovative optical alignment technique for CMP wafers
Proceedings Volume 4691, (2002) https://doi.org/10.1117/12.474475
KEYWORDS: Chemical mechanical planarization, Optical alignment, Semiconducting wafers, Algorithm development, Diffraction, Sensors, Reflectivity, Detection and tracking algorithms, Distortion, Reticles
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